Gantry fixed-type stage (stone base)
Gantry fixed-type stage (stone base)
X-axis stage on a stone base plate Linear motor stage mounted on a gantry frame with a Y-axis stage 【Features】 ○ Achieves high precision by separating the XY axes ○ Equipped with a suction table compatible with 650mm square size workpieces ○ Optimal for various processes of large substrates ○ Adopts parallel drive on the Y-axis Achieves constant velocity of less than 1% and enables reading at low speeds ○ Adopts multi-carrier drive on the X-axis Allows for a dual-head configuration, easily increasing throughput ● For other functions and details, please download the catalog.
- 企業：ウイング
- 価格：Other
